Modeling of the substrate bias effect in reactive sputtering
Saved in:
| Other Authors: | , , , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
2007
|
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Perpustakaan Laman Hikmah Kampus Induk, UTeM: Archives
| Call Number: |
MAK 00009 |
|---|---|
| Copy Unknown | Available Place a Hold |
| Copy Unknown | Not for loan Recall This |