Handbook of silicon based MEMS materials and technologies
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Amsterdam
William Andrew/Elsevier
2010
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| Series: | Micro & nano technologies series
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| Subjects: | |
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| Physical Description: | xxxii, 636 p. ill. 28 cm |
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| ISBN: | 9780815515944 |