Handbook of silicon based MEMS materials and technologies

Handbook of silicon based MEMS materials and technologies

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Bibliographic Details
Other Authors: Lindroos, Veikko
Format: Book
Language:English
Published: Amsterdam William Andrew/Elsevier 2010
Series:Micro & nano technologies series
Subjects:
Microelectromechanical systems > Materials
Microelectromechanical systems
Silicon > Electric properties
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Perpustakaan Laman Hikmah Kampus Teknologi, UTeM: Open Shelf

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Perpustakaan Laman Hikmah Kampus Induk, UTeM: Open Shelf

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