APA (7th ed.) Citation

Glendinning, W. B., & Helbert, J. N. (1991). Handbook of VLSI microlithography: Principles, technology, and applications (Rep.ed.). Noyes Pub.

Chicago Style (17th ed.) Citation

Glendinning, William B., and John N. Helbert. Handbook of VLSI Microlithography: Principles, Technology, and Applications. Rep.ed. Park Ridge, NJ: Noyes Pub, 1991.

MLA (8th ed.) Citation

Glendinning, William B., and John N. Helbert. Handbook of VLSI Microlithography: Principles, Technology, and Applications. Rep.ed. Noyes Pub, 1991.