Handbook of VLSI microlithography principles, technology, and applications
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| Other Authors: | , |
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| Format: | Book |
| Language: | English |
| Published: |
Park Ridge, NJ
Noyes Pub.
1991
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| Edition: | Rep.ed. |
| Series: | Materials Science and process technology series
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| Subjects: | |
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| Physical Description: | xxii, 649 p. ill. 23 cm |
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| ISBN: | 9780815512813 |