Handbook of VLSI microlithography principles, technology, and applications
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| 其他作者: | , |
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| 格式: | 图书 |
| 语言: | English |
| 出版: |
Park Ridge, NJ
Noyes Pub.
1991
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| 版: | Rep.ed. |
| 丛编: | Materials Science and process technology series
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| 主题: | |
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Perpustakaan Laman Hikmah Kampus Induk, UTeM: Reference
| 索引号: |
TK7874 H36 1991 |
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| 复印件 Unknown | 可用 预订 |