Donovan, R. (1990). Particle control for semiconductor manufacturing. Marcel Dekker.
Chicago Style (17th ed.) CitationDonovan, R.P. Particle Control for Semiconductor Manufacturing. New York, NY: Marcel Dekker, 1990.
MLA (8th ed.) CitationDonovan, R.P. Particle Control for Semiconductor Manufacturing. Marcel Dekker, 1990.
Warning: These citations may not always be 100% accurate.