APA (7th ed.) Citation

Doering, R., & Nishi, Y. (2000). Handbook of semiconductor manufacturing technology. Marcel Dekker.

Chicago Style (17th ed.) Citation

Doering, Robert, and Yoshio Nishi. Handbook of Semiconductor Manufacturing Technology. New York, NY: Marcel Dekker, 2000.

MLA (8th ed.) Citation

Doering, Robert, and Yoshio Nishi. Handbook of Semiconductor Manufacturing Technology. Marcel Dekker, 2000.

Warning: These citations may not always be 100% accurate.