Fabrication of silicon microprobes for optical near-field applications

Fabrication of silicon microprobes for optical near-field applications

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Bibliographic Details
Main Author:	Minh
Other Authors:	Ono Takahito, Esashi Masayoshi
Format:	Book
Language:	English
Published:	Boca Raton,FL. CRC Press 2002
Subjects:	Micromachining Near-field microscopy Microprobe analysis Silicon
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