Fabrication of silicon microprobes for optical near-field applications

Fabrication of silicon microprobes for optical near-field applications

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Bibliographic Details
Main Author: Minh
Other Authors: Ono Takahito, Esashi Masayoshi
Format: Book
Language:English
Published: Boca Raton,FL. CRC Press 2002
Subjects:
Micromachining
Near-field microscopy
Microprobe analysis
Silicon
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Fabrication of silicon microprobes for optical near-field applications
by Minh
Published 2002
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Fabrication of silicon microprobes for optical near-field applications /
by Minh, Phan Ngoc
Published 2002
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