Design of shallow Source/Drain Extension (SDE) profiles in improving Short Channel Effect (SCEs) in nanoscale devices /
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| Main Author: | |
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| Format: | Software eBook |
| Language: | English |
| Published: |
2013.
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| Subjects: | |
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| Item Description: | Accompanied by CD : CDR 09588. |
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| Physical Description: | xxi, 79 pages : illustrations, charts ; 30 cm + 1 computer disc (12 cm) |