Formation of shallow PN junction by BF2 dopant into SI substrate /
Saved in:
| Main Author: | |
|---|---|
| Format: | Software eBook |
| Language: | English |
| Published: |
2013.
|
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Item Description: | Accompanied by CD : CDR 09600. |
|---|---|
| Physical Description: | xiv, 65 pages : illustrations ; 30 cm + 1 computer disc (12 cm) |