Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range /
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| Other Authors: | , |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
John Wiley,
2005.
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| Subjects: | |
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| Physical Description: | xxii, 519 pages : illustrations ; 25 cm. |
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| ISBN: | 352740502X 9783527405022 |