Sedky, S. (2006). Post-processing techniques for integrated MEMS. Artech House.
Citación estilo ChicagoSedky, Sherif. Post-processing Techniques for Integrated MEMS. Boston: Artech House, 2006.
Cita MLASedky, Sherif. Post-processing Techniques for Integrated MEMS. Artech House, 2006.
Warning: These citations may not always be 100% accurate.