Post-processing techniques for integrated MEMS /
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| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Boston :
Artech House,
2006.
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| 100 | 1 | |a Sedky, Sherif. , |e author |9 172864 | |
| 245 | 1 | 0 | |a Post-processing techniques for integrated MEMS / |c Sherif Sedky. |
| 264 | 1 | |a Boston : |b Artech House, |c 2006. | |
| 300 | |a xiv, 207 pages : |b illustrations ; |c 24 cm. | ||
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