Hong, L., & Craven, D. R. (2005). Tribology in chemical-mechanical planarization. Taylor and Francis.
Chicago Style (17th ed.) CitationHong, Liang, and David R. Craven. Tribology in Chemical-mechanical Planarization. Boca Raton, FL: Taylor and Francis, 2005.
MLA (8th ed.) CitationHong, Liang, and David R. Craven. Tribology in Chemical-mechanical Planarization. Taylor and Francis, 2005.
Warning: These citations may not always be 100% accurate.