Tribology in chemical-mechanical planarization /
Uloženo v:
| Hlavní autor: | |
|---|---|
| Další autoři: | |
| Médium: | Kniha |
| Jazyk: | English |
| Vydáno: |
Boca Raton, FL :
Taylor and Francis,
2005.
|
| Témata: | |
| Tagy: |
Přidat tag
Žádné tagy, Buďte první, kdo otaguje tento záznam!
|
| LEADER | 01199cam a2200301 i 4500 | ||
|---|---|---|---|
| 001 | u68019 | ||
| 003 | SIRSI | ||
| 005 | 20210114115655.0 | ||
| 008 | 110131 eng | ||
| 020 | |a 0824725670 | ||
| 050 | |a TJ1075 |b .H64 2005 | ||
| 100 | 1 | |a Hong, Liang. , |e author |9 163174 | |
| 245 | 1 | 0 | |a Tribology in chemical-mechanical planarization / |c Hong Liang, David Craven. |
| 264 | 1 | |a Boca Raton, FL : |b Taylor and Francis, |c 2005. | |
| 300 | |a 185 pages : |b illustrations ; |c 24 cm. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a unmediated |b n |2 rdamedia | ||
| 338 | |a volume |b nc |2 rdacarrier | ||
| 596 | |a 1 3 | ||
| 650 | 0 | |a Tribology. |9 303 | |
| 650 | 0 | |a Grinding and polishing. |9 19589 | |
| 700 | 1 | |a Craven, David R. |9 176029 | |
| 942 | |c BOOK_OA | ||
| 997 | |a 112154; 112155 | ||
| 998 | |a 1 |b Shafrizan Shafferi | ||
| 999 | |c 126143 |d 126143 | ||
| 952 | |0 0 |1 0 |2 LCC |4 0 |6 TJ1075 H64 02005 |7 0 |9 227068 |a UTHM_LIB |b UTHM_LIB |c OPENACCS |d 2006-11-20 |g 553.77 |l 0 |o TJ1075 .H64 2005 |p 1000178686 |r 2020-12-05 |t 1 |w 2020-12-05 |y BOOK_OA | ||
| 952 | |0 0 |1 0 |2 LCC |4 0 |6 TJ1075 H64 02005 |7 0 |9 227069 |a PAGOH_LIB |b PAGOH_LIB |c OPENACCS |d 2006-11-20 |g 553.77 |l 0 |o TJ1075 .H64 2005 |p 1000178687 |r 2020-12-05 |t 1 |w 2020-12-05 |y BOOK_OA | ||