Tribology in chemical-mechanical planarization /

Tribology in chemical-mechanical planarization /

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Библиографические подробности
Главный автор:	Hong, Liang (Автор)
Другие авторы:	Craven, David R.
Формат:	‌
Язык:	English
Опубликовано:	Boca Raton, FL : Taylor and Francis, 2005.
Предметы:	Tribology. Grinding and polishing.
Метки:	Добавить метку Нет меток, Требуется 1-ая метка записи!

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