The MEMS handbook /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, FL :
CRC Press,
2006.
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| Edition: | 2nd ed. |
| Series: | Mechanical engineering series
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| Subjects: | |
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| Physical Description: | 3 volume : illustrations ; 26 cm. |
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| ISBN: | 0849391377 0849391385 0849391393 |