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| 003 | SIRSI | ||
| 005 | 20210114121813.0 | ||
| 008 | 110131 eng | ||
| 020 | |a 0444521941 |q set | ||
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| 050 | |a TK7875 |b .C65 2008 | ||
| 245 | 0 | 0 | |a Comprehensive microsystems / |c Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe, editors. |
| 264 | 1 | |a Boston, MA : |b Elsevier, |c 2007. | |
| 300 | |a 3 volume : |b illustrations (some color) ; |c 27 cm. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a unmediated |b n |2 rdamedia | ||
| 338 | |a volume |b nc |2 rdacarrier | ||
| 505 | 0 | 0 | |a v. 1. Materials. Fabrication and packaging. Electronics and systems design -- volume 2. Actuation mechanism. Physical sensing. Chemical and biological systems -- volume 3. Optical systems. Industrial applications. Emerging topics |
| 596 | |a 1 | ||
| 650 | 0 | |a Microelectromechanical systems. |9 3145 | |
| 700 | 1 | |a Gianchandani, Yogesh B. |9 202966 | |
| 700 | 1 | |a Tabata, Osamu. |9 80754 | |
| 700 | 1 | |a Zappe, Hans. |9 164812 | |
| 942 | |c BOOK_OA | ||
| 997 | |a 141096; 141097; 141098 | ||
| 998 | |a 1 |b Shafrizan Shafferi | ||
| 999 | |c 150322 |d 150322 | ||
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