MEMS technology and devices /
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| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Singapore :
Pan Stanford Publishing,
2007.
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| Physical Description: | xv, 441 pages : illustrations ; 24 cm.+ 1 computer optical disc (4 3/4 in.). |
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| ISBN: | 9812709606 9789812709608 |