MEMS technology and devices /
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| Institution som forfatter: | |
|---|---|
| Andre forfattere: | |
| Format: | Conference Proceeding Bog |
| Sprog: | English |
| Udgivet: |
Singapore :
Pan Stanford Publishing,
2007.
|
| Fag: | |
| Tags: |
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| 111 | 1 | |a International Conference on Materials for Advanced Technologies : |d (2007 : |c Singapore) |9 203378 | |
| 245 | 0 | 0 | |a MEMS technology and devices / |c Aiqun Liu ... [and others]. |
| 264 | 1 | |a Singapore : |b Pan Stanford Publishing, |c 2007. | |
| 300 | |a xv, 441 pages : |b illustrations ; |c 24 cm.+ |e 1 computer optical disc (4 3/4 in.). | ||
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| 650 | 0 | |a Microelectromechanical systems |v Congresses. |9 3145 | |
| 650 | 0 | |a Nanostructured materials |v Congresses. |9 29861 | |
| 700 | 1 | |a Liu, Aiqun. |9 203379 | |
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