APA (7th ed.) Citation

Ghodssi, R., & Lin, P. (2011). Mems materials and processes handbook. Springer.

Chicago Style (17th ed.) Citation

Ghodssi, Reza, and Pinyen Lin. Mems Materials and Processes Handbook. New York: Springer, 2011.

MLA (8th ed.) Citation

Ghodssi, Reza, and Pinyen Lin. Mems Materials and Processes Handbook. Springer, 2011.