Ghodssi, R., & Lin, P. (2011). Mems materials and processes handbook. Springer.
Chicago Style (17th ed.) CitationGhodssi, Reza, and Pinyen Lin. Mems Materials and Processes Handbook. New York: Springer, 2011.
MLA (8th ed.) CitationGhodssi, Reza, and Pinyen Lin. Mems Materials and Processes Handbook. Springer, 2011.
Warning: These citations may not always be 100% accurate.