Mems materials and processes handbook /
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| Other Authors: | , |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
Springer,
2011.
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| Series: | Mems refernce shelf
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| Subjects: | |
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| Physical Description: | xxxv, 1187 pages : illustrations ; 24 cm. |
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| ISBN: | 9780387473161 |