Mems materials and processes handbook /
Tallennettuna:
| Muut tekijät: | , |
|---|---|
| Aineistotyyppi: | Kirja |
| Kieli: | English |
| Julkaistu: |
New York :
Springer,
2011.
|
| Sarja: | Mems refernce shelf
|
| Aiheet: | |
| Tagit: |
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| 008 | 110127s2011 nyu 000 0 eng | ||
| 020 | |a 9780387473161 | ||
| 050 | 1 | 4 | |a TJ163 |b .M45 2011 |
| 245 | 0 | 0 | |a Mems materials and processes handbook / |c editors, Reza Ghodssi, Pinyen Lin. |
| 264 | 1 | |a New York : |b Springer, |c 2011. | |
| 300 | |a xxxv, 1187 pages : |b illustrations ; |c 24 cm. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a unmediated |b n |2 rdamedia | ||
| 338 | |a volume |b nc |2 rdacarrier | ||
| 490 | 1 | |a Mems refernce shelf | |
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| 650 | 0 | |a Microelectromechanical systems |x Materials. |9 3145 | |
| 650 | 0 | |a Microelectromechanical systems. |9 3145 | |
| 700 | 1 | |a Ghodssi, Reza. |9 38103 | |
| 700 | 1 | |a Lin, Pinyen. |9 38104 | |
| 942 | |c BOOK_OA | ||
| 997 | |a 191864; 191865 | ||
| 998 | |a 1 |b Shafrizan Shafferi | ||
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