Micromachines as tools for nanotechnology
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| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin
Springer
2003
|
| Schriftenreihe: | Microtechnology and MEMS
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| Schlagworte: | |
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| 245 | 1 | 0 | |a Micromachines as tools for nanotechnology |c /H. Fujita, edited |
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| 300 | |a xii, 211 p. |b ill. |c 24 cm | ||
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