Silicon Electric properties 38 Materials 31 Integrated circuits 22 Optical properties 16 Semiconductors 16 Optoelectronic devices 14 Photonics 13 Bipolar transistors 11 Design and construction 11 Very large scale integration 10 Heterostructures 7 Surface chemistry 7 Surfaces 7 Epitaxy 6 Microelectromechanical systems 6 Nanostructured materials 6 Electronics 5 Gallium arsenide 5 Micromachining 5 Analysis 4 Data processing 4 Electric conductors 4 Etching 4 History 4 Microprobe analysis 4 Millimeter wave communication systems 4 Millimeter wave devices 4 Near-field microscopy 4 Optical communications 4