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  1. 1
    Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices /
    by Paik, Ungyu
    Published 2009
    Subjects: “…Chemical mechanical planarization.…”
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  2. 2
    Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices /
    by Paik, Ungyu
    Published 2009
    Subjects: “…Chemical mechanical planarization. 198172…”
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  3. 3
    Microelectronic applications of chemical mechanical planarization /
    Published 2007
    Subjects: “…Chemical mechanical planarization.…”
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  4. 4
    Microelectronic applications of chemical mechanical planarization /
    Published 2008
    Subjects: “…Chemical mechanical planarization.…”
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  5. 5
    Tribology in chemical-mechanical planarization
    by Liang, Hong
    Published 2005
    Subjects: “…Chemical mechanical planarization 17912…”
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  6. 6
    Tribology in chemical-mechanical planarization
    by Liang, Hong
    Published 2005
    Subjects: “…Chemical mechanical planarization 17912…”
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  7. 7
    Microelectronic applications of chemical mechanical planarization
    Published 2008
    Subjects: “…Chemical mechanical planarization 17912…”
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  8. 8
    Microelectronic applications of chemical mechanical planarization
    Published 2008
    Subjects: “…Chemical mechanical planarization 17912…”
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  9. 9
    Microelectronic applications of chemical mechanical planarization /
    Published 2008
    Subjects: “…Chemical mechanical planarization. 198172…”
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