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  1. 1
    Multilayer thin electrostatic actuator supported by only lubricating oil for fine stages
    by Mariam Md Ghazaly
    Published 2012
    Thesis Book
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  2. 2
    Multilayer thin electrostatic actuator supported by only lubricating oil for fine stages
    by Mariam Md Ghazaly
    Published 2012
    Thesis Book
    Save to List
    Saved in:
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