Micromechanics and MEMS : classic and seminal papers to 1990 /

Micromechanics and MEMS : classic and seminal papers to 1990 /

Guardat en:

Dades bibliogràfiques
Autor corporatiu:	Institute of Electrical and Electronics Engineers
Altres autors:	Trimmer, W.
Format:	Llibre
Idioma:	English
Publicat:	New York IEEE Press 1997.
Matèries:	Microelectronics Microelectromechanical systems. Actuators.
Etiquetes:	Afegir etiqueta Sense etiquetes, Sigues el primer a etiquetar aquest registre!

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