Micromechanics and MEMS : classic and seminal papers to 1990 /
Sábháilte in:
Údar corparáideach: | Institute of Electrical and Electronics Engineers |
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Rannpháirtithe: | Trimmer, W. |
Formáid: | LEABHAR |
Teanga: | English |
Foilsithe / Cruthaithe: |
New York
IEEE Press
1997.
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Ábhair: | |
Clibeanna: |
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