Micromechanics and MEMS : classic and seminal papers to 1990 /

Micromechanics and MEMS : classic and seminal papers to 1990 /

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書誌詳細
団体著者:	Institute of Electrical and Electronics Engineers
その他の著者:	Trimmer, W.
フォーマット:	図書
言語:	English
出版事項:	New York IEEE Press 1997.
主題:	Microelectronics Microelectromechanical systems. Actuators.
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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