Micromechanics and MEMS : classic and seminal papers to 1990 /

Micromechanics and MEMS : classic and seminal papers to 1990 /

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Bibliografske podrobnosti
Korporativna značnica:	Institute of Electrical and Electronics Engineers
Drugi avtorji:	Trimmer, W.
Format:	Knjiga
Jezik:	English
Izdano:	New York IEEE Press 1997.
Teme:	Microelectronics Microelectromechanical systems. Actuators.
Oznake:	Označite Brez oznak, prvi označite!

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