Micromechanics and MEMS : classic and seminal papers to 1990 /

Micromechanics and MEMS : classic and seminal papers to 1990 /

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书目详细资料
企业作者:	Institute of Electrical and Electronics Engineers
其他作者:	Trimmer, W.
格式:	图书
语言:	English
出版:	New York IEEE Press 1997.
主题:	Microelectronics Microelectromechanical systems. Actuators.
标签:	添加标签没有标签, 成为第一个标记此记录!

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