An Introduction to microelectromechanical systems engineering /
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主要作者: | Maluf, Nadim (Author) |
---|---|
其他作者: | Williams, Kirt |
格式: | 图书 |
语言: | English |
出版: |
Boston
Artech House
2004
|
版: | Second edition. |
丛编: | Microelectromechanical systems series
|
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