Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /

Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /

The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.

Guardat en:
Dades bibliogràfiques
Autor principal: Mohammad Nuzaihan Bin Md Nor (Autor)
Autor corporatiu: Universiti Malaysia Perlis
Format: Thesis Software eBook
Idioma:English
Publicat: Kangar Universiti Malaysia Perlis (UniMAP) 2007.
Matèries:
Nanowires
Nanostructure materials > Electric properties
Electrochemistry.
Etiquetes: Afegir etiqueta
Sense etiquetes, Sigues el primer a etiquetar aquest registre!
Descripció
Sumari:The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.
Descripció de l’ítem:Tesis 2007
Accompanied by CD-ROM (901000006)
Descripció física:xxv, 108 p. ill. 30 cm. + 1 CD-ROM (4 3/4 in.)

Ítems similars