Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /
The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.
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| Format: | Thesis Software eBog |
| Sprog: | English |
| Udgivet: |
Kangar
Universiti Malaysia Perlis (UniMAP)
2007.
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| Summary: | The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method. |
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| Emne beskrivelse: | Tesis 2007 Accompanied by CD-ROM (901000006) |
| Fysisk beskrivelse: | xxv, 108 p. ill. 30 cm. + 1 CD-ROM (4 3/4 in.) |