Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /

Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /

The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.

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Autor principal: Mohammad Nuzaihan Bin Md Nor (Autor)
Autor corporatiu: Universiti Malaysia Perlis
Format: Thesis Software eBook
Idioma:English
Publicat: Kangar Universiti Malaysia Perlis (UniMAP) 2007.
Matèries:
Nanowires
Nanostructure materials > Electric properties
Electrochemistry.
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