Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /
The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.
में बचाया:
मुख्य लेखक: | Mohammad Nuzaihan Bin Md Nor (लेखक) |
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निगमित लेखक: | Universiti Malaysia Perlis |
स्वरूप: | थीसिस सॉफ्टवेयर ई-पुस्तक |
भाषा: | English |
प्रकाशित: |
Kangar
Universiti Malaysia Perlis (UniMAP)
2007.
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विषय: | |
टैग : |
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