Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /
The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.
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| Formato: | Tese Software livro eletrônico |
| Idioma: | English |
| Publicado em: |
Kangar
Universiti Malaysia Perlis (UniMAP)
2007.
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