Fabrication of silicon nanowires using scanning electron microscope based electron beam lithography method /
The goal of this research work is to form and produce very small nanowires using a Top-Down Nanofabrication Method which involved Scanning Electron Microscope (SEM) based Electron Beam Litography (EBL) method.
Sábháilte in:
| Príomhchruthaitheoir: | |
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| Údar corparáideach: | |
| Formáid: | Tráchtas Bogearraí Ríomhleabhar |
| Teanga: | English |
| Foilsithe / Cruthaithe: |
Kangar
Universiti Malaysia Perlis (UniMAP)
2007.
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| Ábhair: | |
| Clibeanna: |
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