Silicon nanowire sensor from electron beam litography : design, fabrication and characterization /

Silicon nanowire sensor from electron beam litography : design, fabrication and characterization /

Taispeáin leaganacha eile (1)

This study demonstrates the process development of silicon nanowires (SiNWs) sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. There are three objectives that applied to this research work. The first objective is to design masks using GDSII Ed...

Cur síos iomlán

Sábháilte in:

Sonraí bibleagrafaíochta
Príomhchruthaitheoir:	Siti Fatimah Abd Rahman (Údar)
Údar corparáideach:	Universiti Malaysia Perlis
Formáid:	Tráchtas LEABHAR
Teanga:	English
Foilsithe / Cruthaithe:	Perlis, Malaysia School of Microelectronic 2011.
Ábhair:	Nanowires.
Clibeanna:	Cuir clib leis Níl clibeanna ann, Bí ar an gcéad duine le clib a chur leis an taifead seo!

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