Silicon nanowire sensor from electron beam litography : design, fabrication and characterization /

Silicon nanowire sensor from electron beam litography : design, fabrication and characterization /

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This study demonstrates the process development of silicon nanowires (SiNWs) sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. There are three objectives that applied to this research work. The first objective is to design masks using GDSII Ed...

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書誌詳細
第一著者:	Siti Fatimah Abd Rahman (著者)
団体著者:	Universiti Malaysia Perlis
フォーマット:	学位論文図書
言語:	English
出版事項:	Perlis, Malaysia School of Microelectronic 2011.
主題:	Nanowires.
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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