Silicon nanowire sensor from electron beam litography : design, fabrication and characterization /

Silicon nanowire sensor from electron beam litography : design, fabrication and characterization /

अन्य संस्करण दिखाएं (1)

This study demonstrates the process development of silicon nanowires (SiNWs) sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. There are three objectives that applied to this research work. The first objective is to design masks using GDSII Ed...

पूर्ण विवरण

में बचाया:

ग्रंथसूची विवरण
मुख्य लेखक:	Siti Fatimah Abd Rahman (लेखक)
निगमित लेखक:	Universiti Malaysia Perlis
स्वरूप:	थीसिस पुस्तक
भाषा:	English
प्रकाशित:	Perlis, Malaysia School of Microelectronic 2011.
विषय:	Nanowires.
टैग :	टैग जोड़ें कोई टैग नहीं, इस रिकॉर्ड को टैग करने वाले पहले व्यक्ति बनें!

समान संसाधन

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