Mems and microsystems : design, manufacture, and nanoscale engineering

Mems and microsystems : design, manufacture, and nanoscale engineering

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Bibliografiske detaljer
Hovedforfatter: Hsu, Tai-Ran (Author)
Format: Bog
Sprog:English
Udgivet: Hoboken, NJ John Wiley & Sons 2008
Udgivelse:Second edition
Fag:
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.
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MEMS and microsystems : design, manufacture and nanoscale engineering /
af Hsu, Tai-Ran
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MEMS and microsystems design, manufacture, and nanoscale engineering
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MEMS and microsystems design, manufacture, and nanoscale engineering
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