MEMS : design and fabrication /
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| 格式: | 图书 |
| 语言: | English |
| 出版: |
Boca Raton, FL
CRC Press/Taylor & Francis Group
2006.
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| 版: | Second edition |
| 丛编: | Mechanical engineering series (Boca Raton, Fla.)
The MEMS handbook |
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| Item Description: | One of three parts whose previous edition was a published as a single volume. |
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| 实物描述: | 1 volumes (various pagings): illustrations; 26 cm |
| ISBN: | 0849391385 0849321069 (set) |