MEMS : design and fabrication /
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| Autres auteurs: | |
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| Format: | Livre |
| Langue: | English |
| Publié: |
Boca Raton, FL
CRC Press/Taylor & Francis Group
2006.
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| Édition: | Second edition |
| Collection: | Mechanical engineering series (Boca Raton, Fla.)
The MEMS handbook |
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| Description: | One of three parts whose previous edition was a published as a single volume. |
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| Description matérielle: | 1 volumes (various pagings): illustrations; 26 cm |
| ISBN: | 0849391385 0849321069 (set) |