MEMS : design and fabrication /
Guardat en:
| Altres autors: | |
|---|---|
| Format: | Llibre |
| Idioma: | English |
| Publicat: |
Boca Raton, FL
CRC Press/Taylor & Francis Group
2006.
|
| Edició: | Second edition |
| Col·lecció: | Mechanical engineering series (Boca Raton, Fla.)
The MEMS handbook |
| Matèries: | |
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