MEMS : design and fabrication /

MEMS : design and fabrication /

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Détails bibliographiques
Autres auteurs:	Gad-el-Hak, Mohamed, 1945-
Format:	Livre
Langue:	English
Publié:	Boca Raton, FL CRC Press/Taylor & Francis Group 2006.
Édition:	Second edition
Collection:	Mechanical engineering series (Boca Raton, Fla.) The MEMS handbook
Sujets:	Microelectromechanical systems > Design and construction. Microfabrication. Microelectromechanical systems
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