MEMS : design and fabrication /
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| Andre forfattere: | |
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| Format: | Bog |
| Sprog: | English |
| Udgivet: |
Boca Raton, FL
CRC Press/Taylor & Francis Group
2006.
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| Udgivelse: | Second edition |
| Serier: | Mechanical engineering series (Boca Raton, Fla.)
The MEMS handbook |
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